Thermal conductivity tensor of semiconductor layers using two-wire 3-omega method

Chuanle Zhou, G. Koblmüller, M. Bichler, G. Abstreiter, Matthew A Grayson*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

We used the two-wire 3ω method to measure the in-plane and out-of-plane thermal conductivity of thin films and analyzed the error for all fitting parameters. We find the heater half-width, the insulating layer thickness and the out-of-plane thermal conductivity of the insulating layer the most sensitive parameters in an accurate fitting. The data of a 2.5 μm GaAs thin film suggests that the phonon mean free path in the film is limited to the film thickness, far shorter than that in the bulk material at low temperatures.

Original languageEnglish (US)
Title of host publicationQuantum Sensing and Nanophotonic Devices X
Volume8631
DOIs
StatePublished - Apr 9 2013
EventQuantum Sensing and Nanophotonic Devices X - San Francisco, CA, United States
Duration: Feb 3 2013Feb 7 2013

Other

OtherQuantum Sensing and Nanophotonic Devices X
CountryUnited States
CitySan Francisco, CA
Period2/3/132/7/13

Keywords

  • GaAs thin film
  • phonon mean free path
  • thermal conductivity

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Fingerprint Dive into the research topics of 'Thermal conductivity tensor of semiconductor layers using two-wire 3-omega method'. Together they form a unique fingerprint.

Cite this