@inproceedings{c09b86c7651d4a14a836bfc142b7bcad,
title = "Thermal conductivity tensor of semiconductor layers using two-wire 3-omega method",
abstract = "We used the two-wire 3ω method to measure the in-plane and out-of-plane thermal conductivity of thin films and analyzed the error for all fitting parameters. We find the heater half-width, the insulating layer thickness and the out-of-plane thermal conductivity of the insulating layer the most sensitive parameters in an accurate fitting. The data of a 2.5 μm GaAs thin film suggests that the phonon mean free path in the film is limited to the film thickness, far shorter than that in the bulk material at low temperatures.",
keywords = "GaAs thin film, phonon mean free path, thermal conductivity",
author = "Chuanle Zhou and G. Koblm{\"u}ller and M. Bichler and G. Abstreiter and M. Grayson",
year = "2013",
doi = "10.1117/12.2014610",
language = "English (US)",
isbn = "9780819494009",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Quantum Sensing and Nanophotonic Devices X",
note = "Quantum Sensing and Nanophotonic Devices X ; Conference date: 03-02-2013 Through 07-02-2013",
}