Thermal imaging by infrared near-field microscopy

C. Feng*, M. S. Unlu, B. B. Goldberg, W. D. Herzog

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Scopus citations


A non-invasive, affordable and easy-to-maintain thermal imaging system capable of measuring devices under normal operating conditions is described. The system's operating principle is based on the application of near-field scanning optical microscopy (NSOM) to infrared (IR) thermography. Results of the preliminary test of the system performance are presented.

Original languageEnglish (US)
Pages (from-to)249-250
Number of pages2
JournalConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
StatePublished - Dec 1 1996

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Industrial and Manufacturing Engineering


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