Thermal stability of hard TiN/SiNx multilayer coatings with an equiaxed microstructure

Yu Hsia Chen, Murat Guruz, Yip-Wah Chung*, Leon M Keer

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

43 Scopus citations


Hard TiN/SiNx multilayer coatings with an equiaxed microstructure were prepared using a dual-cathode unbalanced reactive-magnetron sputtering system. These multilayer coatings were then annealed at 1000 °C for 1 h in vacuum. These TiN/SiNx multilayer coatings before and after annealing were characterized at room temperature and compared in terms of microstructure and mechanical properties. X-Ray diffraction and cross-sectional transmission electron microscopy studies showed that the layer structure of these coatings is preserved after annealing at 1000 °C when the SiNx layer thickness is 0.8 nm or greater. The high hardness of these multilayer coatings is either maintained or improved after annealing. Therefore, with proper control of the SiNx thickness, TiN/SiNx multilayer coatings demonstrate excellent thermal stability and are potential candidates for high-temperature tribological applications.

Original languageEnglish (US)
Pages (from-to)162-166
Number of pages5
JournalSurface and Coatings Technology
Issue number2-3
StatePublished - May 15 2002


  • Microstructure
  • Multilayer coatings
  • Nanolayer
  • Sputtering
  • Thermal stability

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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