Thermally actuated probe array for parallel dip-pen nanolithography

Xuefeng Wang; David A. Bullen; Jun Zou; Chang Liu; Chad A. Mirkin

doi:10.1116/1.1805544

Thermally actuated probe array for parallel dip-pen nanolithography

Xuefeng Wang^*, David A. Bullen, Jun Zou, Chang Liu, Chad A. Mirkin

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

36 Scopus citations

Abstract

Dip-pen nanolithography (DPN) uses scanning probes to directly deposit chemical and biological materials on a solid substrate. It offers the advantages of nanometer resolution and flexibility in pattern generation. Conventional DPN uses a single probe and its throughput is limited due to the serial nature of the process. This article reports the development of a linear silicon probe array that enables parallel DPN writing with improved throughput. The probe array has ten probes with tips with 100 nm radius of curvature. Each probe in the array is individually controllable by a bimorph thermal actuator on its cantilever. DPN writing tests with octadecanethiol (ODT) as ink on gold surface have been conducted on an atomic force microscope. Simultaneous generation of ten different ODT patterns has been achieved with an average linewidth of 40 nm.

Original language	English (US)
Pages (from-to)	2563-2567
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	22
Issue number	6
DOIs	https://doi.org/10.1116/1.1805544
State	Published - Nov 2004

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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title = "Thermally actuated probe array for parallel dip-pen nanolithography",

abstract = "Dip-pen nanolithography (DPN) uses scanning probes to directly deposit chemical and biological materials on a solid substrate. It offers the advantages of nanometer resolution and flexibility in pattern generation. Conventional DPN uses a single probe and its throughput is limited due to the serial nature of the process. This article reports the development of a linear silicon probe array that enables parallel DPN writing with improved throughput. The probe array has ten probes with tips with 100 nm radius of curvature. Each probe in the array is individually controllable by a bimorph thermal actuator on its cantilever. DPN writing tests with octadecanethiol (ODT) as ink on gold surface have been conducted on an atomic force microscope. Simultaneous generation of ten different ODT patterns has been achieved with an average linewidth of 40 nm.",

author = "Xuefeng Wang and Bullen, {David A.} and Jun Zou and Chang Liu and Mirkin, {Chad A.}",

note = "Funding Information: This work is supported by the U.S. Department of Defense under Contract No. ARMY NW 0650300F245 and by the National Science Foundation under Contract No. 9984954. Copyright: Copyright 2011 Elsevier B.V., All rights reserved.",

year = "2004",

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doi = "10.1116/1.1805544",

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AU - Wang, Xuefeng

AU - Bullen, David A.

AU - Zou, Jun

AU - Liu, Chang

AU - Mirkin, Chad A.

N1 - Funding Information: This work is supported by the U.S. Department of Defense under Contract No. ARMY NW 0650300F245 and by the National Science Foundation under Contract No. 9984954. Copyright: Copyright 2011 Elsevier B.V., All rights reserved.

PY - 2004/11

Y1 - 2004/11

N2 - Dip-pen nanolithography (DPN) uses scanning probes to directly deposit chemical and biological materials on a solid substrate. It offers the advantages of nanometer resolution and flexibility in pattern generation. Conventional DPN uses a single probe and its throughput is limited due to the serial nature of the process. This article reports the development of a linear silicon probe array that enables parallel DPN writing with improved throughput. The probe array has ten probes with tips with 100 nm radius of curvature. Each probe in the array is individually controllable by a bimorph thermal actuator on its cantilever. DPN writing tests with octadecanethiol (ODT) as ink on gold surface have been conducted on an atomic force microscope. Simultaneous generation of ten different ODT patterns has been achieved with an average linewidth of 40 nm.

AB - Dip-pen nanolithography (DPN) uses scanning probes to directly deposit chemical and biological materials on a solid substrate. It offers the advantages of nanometer resolution and flexibility in pattern generation. Conventional DPN uses a single probe and its throughput is limited due to the serial nature of the process. This article reports the development of a linear silicon probe array that enables parallel DPN writing with improved throughput. The probe array has ten probes with tips with 100 nm radius of curvature. Each probe in the array is individually controllable by a bimorph thermal actuator on its cantilever. DPN writing tests with octadecanethiol (ODT) as ink on gold surface have been conducted on an atomic force microscope. Simultaneous generation of ten different ODT patterns has been achieved with an average linewidth of 40 nm.

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Thermally actuated probe array for parallel dip-pen nanolithography

Abstract

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