Thin film island growth kinetics: a grazing incidence small angle X-ray scattering study of gold on glass

Joanne R. Levine; J. B. Cohen; Y. W. Chung

doi:10.1016/0039-6028(91)90075-4

Thin film island growth kinetics: a grazing incidence small angle X-ray scattering study of gold on glass

Joanne R. Levine^*, J. B. Cohen, Y. W. Chung

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

78 Scopus citations

Abstract

The growth during deposition and during post-deposition annealing of gold islands (40-80 Å in diameter) on glass substrates have been examined quantitatively and in situ with grazing incidence small angle X-ray scattering (GISAXS). The average island sizes and center-to-center island spacings have been determined as a function of gold coverage and annealing time and temperature. The annealing kinetics do not exhibit a power law dependence of average island size versus time. Instead, the data is best described by a soft-impingement, diffusion-limited, island-mobility-dominated growth model. This model yields a quantitative signature that growth is a result of island mobility. The activation energy and diffusion coefficient for the island mobility growth process are found to be of the same order of magnitude as values for single atom surface diffusion.

Original language	English (US)
Pages (from-to)	215-224
Number of pages	10
Journal	Surface Science
Volume	248
Issue number	1-2
DOIs	https://doi.org/10.1016/0039-6028(91)90075-4
State	Published - May 3 1991

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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10.1016/0039-6028(91)90075-4

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@article{2e10119ac9e24aeca2f31b139f25bbaa,

title = "Thin film island growth kinetics: a grazing incidence small angle X-ray scattering study of gold on glass",

abstract = "The growth during deposition and during post-deposition annealing of gold islands (40-80 {\AA} in diameter) on glass substrates have been examined quantitatively and in situ with grazing incidence small angle X-ray scattering (GISAXS). The average island sizes and center-to-center island spacings have been determined as a function of gold coverage and annealing time and temperature. The annealing kinetics do not exhibit a power law dependence of average island size versus time. Instead, the data is best described by a soft-impingement, diffusion-limited, island-mobility-dominated growth model. This model yields a quantitative signature that growth is a result of island mobility. The activation energy and diffusion coefficient for the island mobility growth process are found to be of the same order of magnitude as values for single atom surface diffusion.",

author = "Levine, {Joanne R.} and Cohen, {J. B.} and Chung, {Y. W.}",

note = "Funding Information: This work was funded by MATRIX through DOE contract no. DE-FGO2-85-ER45183.AOO5. The X-ray work was done in the X-ray diffraction facility of Northwestern University{\textquoteright}s Materials Research Center, funded in part by the NSF-MRC program under contract no DMR85-20280. The authors thank Dr. L.D. Marks, Dr. J.P. Zhang and D.J. Li for their help with the transmission electron microscopy, and Dr. P. Voorhees for useful discussions about growth kinetics. This research is part of a thesis submitted (by J.R. Levine) in partial fulfillment of the requirements for the PhD Degree at Northwestern University.",

year = "1991",

month = may,

day = "3",

doi = "10.1016/0039-6028(91)90075-4",

language = "English (US)",

volume = "248",

pages = "215--224",

journal = "Surface Science",

issn = "0039-6028",

publisher = "Elsevier",

number = "1-2",

}

TY - JOUR

T1 - Thin film island growth kinetics

T2 - a grazing incidence small angle X-ray scattering study of gold on glass

AU - Levine, Joanne R.

AU - Cohen, J. B.

AU - Chung, Y. W.

N1 - Funding Information: This work was funded by MATRIX through DOE contract no. DE-FGO2-85-ER45183.AOO5. The X-ray work was done in the X-ray diffraction facility of Northwestern University’s Materials Research Center, funded in part by the NSF-MRC program under contract no DMR85-20280. The authors thank Dr. L.D. Marks, Dr. J.P. Zhang and D.J. Li for their help with the transmission electron microscopy, and Dr. P. Voorhees for useful discussions about growth kinetics. This research is part of a thesis submitted (by J.R. Levine) in partial fulfillment of the requirements for the PhD Degree at Northwestern University.

PY - 1991/5/3

Y1 - 1991/5/3

N2 - The growth during deposition and during post-deposition annealing of gold islands (40-80 Å in diameter) on glass substrates have been examined quantitatively and in situ with grazing incidence small angle X-ray scattering (GISAXS). The average island sizes and center-to-center island spacings have been determined as a function of gold coverage and annealing time and temperature. The annealing kinetics do not exhibit a power law dependence of average island size versus time. Instead, the data is best described by a soft-impingement, diffusion-limited, island-mobility-dominated growth model. This model yields a quantitative signature that growth is a result of island mobility. The activation energy and diffusion coefficient for the island mobility growth process are found to be of the same order of magnitude as values for single atom surface diffusion.

AB - The growth during deposition and during post-deposition annealing of gold islands (40-80 Å in diameter) on glass substrates have been examined quantitatively and in situ with grazing incidence small angle X-ray scattering (GISAXS). The average island sizes and center-to-center island spacings have been determined as a function of gold coverage and annealing time and temperature. The annealing kinetics do not exhibit a power law dependence of average island size versus time. Instead, the data is best described by a soft-impingement, diffusion-limited, island-mobility-dominated growth model. This model yields a quantitative signature that growth is a result of island mobility. The activation energy and diffusion coefficient for the island mobility growth process are found to be of the same order of magnitude as values for single atom surface diffusion.

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DO - 10.1016/0039-6028(91)90075-4

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SN - 0039-6028

VL - 248

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EP - 224

JO - Surface Science

JF - Surface Science

IS - 1-2

ER -

Thin film island growth kinetics: a grazing incidence small angle X-ray scattering study of gold on glass

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