Thin film island growth kinetics: a grazing incidence small angle X-ray scattering study of gold on glass

Joanne R. Levine*, J. B. Cohen, Y. W. Chung

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

74 Scopus citations

Abstract

The growth during deposition and during post-deposition annealing of gold islands (40-80 Å in diameter) on glass substrates have been examined quantitatively and in situ with grazing incidence small angle X-ray scattering (GISAXS). The average island sizes and center-to-center island spacings have been determined as a function of gold coverage and annealing time and temperature. The annealing kinetics do not exhibit a power law dependence of average island size versus time. Instead, the data is best described by a soft-impingement, diffusion-limited, island-mobility-dominated growth model. This model yields a quantitative signature that growth is a result of island mobility. The activation energy and diffusion coefficient for the island mobility growth process are found to be of the same order of magnitude as values for single atom surface diffusion.

Original languageEnglish (US)
Pages (from-to)215-224
Number of pages10
JournalSurface Science
Volume248
Issue number1-2
DOIs
StatePublished - May 3 1991

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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