Three-dimensional and multilayer nanostructures formed by nanotransfer printing

Jana Zaumseil, Matthew A. Meitl, Julia W P Hsu, Bharat R. Acharya, Kirk W. Baldwin, Yueh Lin Loo, John A. Rogers*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

228 Scopus citations

Abstract

This letter describes the use of nanotransfer printing (nTP) for forming three-dimensional (3D) structures with feature sizes between tens of nanometers and tens of microns over areas of several square millimeters. We demonstrate three different approaches-deep etching through printed hard masks, direct transfer of three-dimensional structures, and purely additive fabrication of multilayer stacks-for using nTP to fabricate a range of complex 3D nanostructures, including closed channels, suspended beams, and nanochannel stacks, that would be difficult or impossible to build with other methods.

Original languageEnglish (US)
Pages (from-to)1223-1227
Number of pages5
JournalNano letters
Volume3
Issue number9
DOIs
StatePublished - Sep 1 2003

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering

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