TY - GEN
T1 - Three dimensional PDMA assembly
T2 - Design, process, and applications
AU - Liu, C.
AU - Chen, J.
AU - Zou, J.
AU - Fan, Z.
PY - 2002
Y1 - 2002
N2 - This paper discusses a recent three-dimensional assembly process called the Plastic Deformation Magnetic Assembly (PDMA) method. The PDMA method allows three dimensional micromechanical structures to be realized efficiently using surface micromachining and wafer-scale, post-sacrificial-release assembly. We will discuss the principle of the PDMA method, along with the design methodology. The PDMA process has been used for a number of applications, including vertical micro RF inductors, micromachined hot wire anemometers, artificial lateral line sensors, and two dimensional neuron probes. The process for these applications will be discussed to illustrate the usefulness of the PDMA process.
AB - This paper discusses a recent three-dimensional assembly process called the Plastic Deformation Magnetic Assembly (PDMA) method. The PDMA method allows three dimensional micromechanical structures to be realized efficiently using surface micromachining and wafer-scale, post-sacrificial-release assembly. We will discuss the principle of the PDMA method, along with the design methodology. The PDMA process has been used for a number of applications, including vertical micro RF inductors, micromachined hot wire anemometers, artificial lateral line sensors, and two dimensional neuron probes. The process for these applications will be discussed to illustrate the usefulness of the PDMA process.
UR - http://www.scopus.com/inward/record.url?scp=78249256387&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=78249256387&partnerID=8YFLogxK
U2 - 10.1115/IMECE2002-33287
DO - 10.1115/IMECE2002-33287
M3 - Conference contribution
AN - SCOPUS:78249256387
SN - 0791836428
SN - 9780791836422
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings
SP - 55
EP - 62
BT - Microelectromechanical Systems
PB - American Society of Mechanical Engineers (ASME)
ER -