Three dimensional PDMA assembly: Design, process, and applications

C. Liu*, J. Chen, J. Zou, Z. Fan

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper discusses a recent three-dimensional assembly process called the Plastic Deformation Magnetic Assembly (PDMA) method. The PDMA method allows three dimensional micromechanical structures to be realized efficiently using surface micromachining and wafer-scale, post-sacrificial-release assembly. We will discuss the principle of the PDMA method, along with the design methodology. The PDMA process has been used for a number of applications, including vertical micro RF inductors, micromachined hot wire anemometers, artificial lateral line sensors, and two dimensional neuron probes. The process for these applications will be discussed to illustrate the usefulness of the PDMA process.

Original languageEnglish (US)
Title of host publicationMicroelectromechanical Systems
PublisherAmerican Society of Mechanical Engineers (ASME)
Pages55-62
Number of pages8
ISBN (Print)0791836428, 9780791836422
DOIs
StatePublished - Jan 1 2002

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings

ASJC Scopus subject areas

  • Mechanical Engineering

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  • Cite this

    Liu, C., Chen, J., Zou, J., & Fan, Z. (2002). Three dimensional PDMA assembly: Design, process, and applications. In Microelectromechanical Systems (pp. 55-62). (ASME International Mechanical Engineering Congress and Exposition, Proceedings). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/IMECE2002-33287