Three-dimensional piezoelectric polymer microsystems for vibrational energy harvesting, robotic interfaces and biomedical implants

Mengdi Han, Heling Wang, Yiyuan Yang, Cunman Liang, Wubin Bai, Zheng Yan, Haibo Li, Yeguang Xue, Xinlong Wang, Banu Akar, Hangbo Zhao, Haiwen Luan, Jaeman Lim, Irawati Kandela, Guillermo Antonio Ameer, Yihui Zhang, Yonggang Huang, John A Rogers

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Piezoelectric microsystems are of use in areas such as mechanical sensing, energy conversion and robotics. The systems typically have a planar structure, but transforming them into complex three-dimensional (3D) frameworks could enhance and extend their various modes of operation. Here, we report a controlled, nonlinear buckling process to convert lithographically defined two-dimensional patterns of electrodes and thin films of piezoelectric polymers into sophisticated 3D piezoelectric microsystems. To illustrate the engineering versatility of the approach, we create more than twenty different 3D geometries. With these structures, we then demonstrate applications in energy harvesting with tailored mechanical properties and root-mean-square voltages ranging from 2 mV to 790 mV, in multifunctional sensors for robotic prosthetic interfaces with improved responsivity (for example, anisotropic responses and sensitivity of 60 mV N −1 for normal force), and in bio-integrated devices with in vivo operational capabilities. The 3D geometries, especially those with ultralow stiffnesses or asymmetric layouts, yield unique mechanical attributes and levels of functionality that would be difficult or impossible to achieve with conventional two-dimensional designs.

Original languageEnglish (US)
Pages (from-to)26-35
Number of pages10
JournalNature Electronics
Volume2
Issue number1
DOIs
StatePublished - Jan 1 2019

Fingerprint

Energy harvesting
Microsystems
robotics
Polymers
Robotics
Geometry
planar structures
polymers
energy conversion
versatility
buckling
geometry
Prosthetics
Energy conversion
layouts
Buckling
stiffness
Stiffness
engineering
mechanical properties

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Instrumentation

Cite this

Han, Mengdi ; Wang, Heling ; Yang, Yiyuan ; Liang, Cunman ; Bai, Wubin ; Yan, Zheng ; Li, Haibo ; Xue, Yeguang ; Wang, Xinlong ; Akar, Banu ; Zhao, Hangbo ; Luan, Haiwen ; Lim, Jaeman ; Kandela, Irawati ; Ameer, Guillermo Antonio ; Zhang, Yihui ; Huang, Yonggang ; Rogers, John A. / Three-dimensional piezoelectric polymer microsystems for vibrational energy harvesting, robotic interfaces and biomedical implants. In: Nature Electronics. 2019 ; Vol. 2, No. 1. pp. 26-35.
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abstract = "Piezoelectric microsystems are of use in areas such as mechanical sensing, energy conversion and robotics. The systems typically have a planar structure, but transforming them into complex three-dimensional (3D) frameworks could enhance and extend their various modes of operation. Here, we report a controlled, nonlinear buckling process to convert lithographically defined two-dimensional patterns of electrodes and thin films of piezoelectric polymers into sophisticated 3D piezoelectric microsystems. To illustrate the engineering versatility of the approach, we create more than twenty different 3D geometries. With these structures, we then demonstrate applications in energy harvesting with tailored mechanical properties and root-mean-square voltages ranging from 2 mV to 790 mV, in multifunctional sensors for robotic prosthetic interfaces with improved responsivity (for example, anisotropic responses and sensitivity of 60 mV N −1 for normal force), and in bio-integrated devices with in vivo operational capabilities. The 3D geometries, especially those with ultralow stiffnesses or asymmetric layouts, yield unique mechanical attributes and levels of functionality that would be difficult or impossible to achieve with conventional two-dimensional designs.",
author = "Mengdi Han and Heling Wang and Yiyuan Yang and Cunman Liang and Wubin Bai and Zheng Yan and Haibo Li and Yeguang Xue and Xinlong Wang and Banu Akar and Hangbo Zhao and Haiwen Luan and Jaeman Lim and Irawati Kandela and Ameer, {Guillermo Antonio} and Yihui Zhang and Yonggang Huang and Rogers, {John A}",
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Han, M, Wang, H, Yang, Y, Liang, C, Bai, W, Yan, Z, Li, H, Xue, Y, Wang, X, Akar, B, Zhao, H, Luan, H, Lim, J, Kandela, I, Ameer, GA, Zhang, Y, Huang, Y & Rogers, JA 2019, 'Three-dimensional piezoelectric polymer microsystems for vibrational energy harvesting, robotic interfaces and biomedical implants' Nature Electronics, vol. 2, no. 1, pp. 26-35. https://doi.org/10.1038/s41928-018-0189-7

Three-dimensional piezoelectric polymer microsystems for vibrational energy harvesting, robotic interfaces and biomedical implants. / Han, Mengdi; Wang, Heling; Yang, Yiyuan; Liang, Cunman; Bai, Wubin; Yan, Zheng; Li, Haibo; Xue, Yeguang; Wang, Xinlong; Akar, Banu; Zhao, Hangbo; Luan, Haiwen; Lim, Jaeman; Kandela, Irawati; Ameer, Guillermo Antonio; Zhang, Yihui; Huang, Yonggang; Rogers, John A.

In: Nature Electronics, Vol. 2, No. 1, 01.01.2019, p. 26-35.

Research output: Contribution to journalArticle

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T1 - Three-dimensional piezoelectric polymer microsystems for vibrational energy harvesting, robotic interfaces and biomedical implants

AU - Han, Mengdi

AU - Wang, Heling

AU - Yang, Yiyuan

AU - Liang, Cunman

AU - Bai, Wubin

AU - Yan, Zheng

AU - Li, Haibo

AU - Xue, Yeguang

AU - Wang, Xinlong

AU - Akar, Banu

AU - Zhao, Hangbo

AU - Luan, Haiwen

AU - Lim, Jaeman

AU - Kandela, Irawati

AU - Ameer, Guillermo Antonio

AU - Zhang, Yihui

AU - Huang, Yonggang

AU - Rogers, John A

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Y1 - 2019/1/1

N2 - Piezoelectric microsystems are of use in areas such as mechanical sensing, energy conversion and robotics. The systems typically have a planar structure, but transforming them into complex three-dimensional (3D) frameworks could enhance and extend their various modes of operation. Here, we report a controlled, nonlinear buckling process to convert lithographically defined two-dimensional patterns of electrodes and thin films of piezoelectric polymers into sophisticated 3D piezoelectric microsystems. To illustrate the engineering versatility of the approach, we create more than twenty different 3D geometries. With these structures, we then demonstrate applications in energy harvesting with tailored mechanical properties and root-mean-square voltages ranging from 2 mV to 790 mV, in multifunctional sensors for robotic prosthetic interfaces with improved responsivity (for example, anisotropic responses and sensitivity of 60 mV N −1 for normal force), and in bio-integrated devices with in vivo operational capabilities. The 3D geometries, especially those with ultralow stiffnesses or asymmetric layouts, yield unique mechanical attributes and levels of functionality that would be difficult or impossible to achieve with conventional two-dimensional designs.

AB - Piezoelectric microsystems are of use in areas such as mechanical sensing, energy conversion and robotics. The systems typically have a planar structure, but transforming them into complex three-dimensional (3D) frameworks could enhance and extend their various modes of operation. Here, we report a controlled, nonlinear buckling process to convert lithographically defined two-dimensional patterns of electrodes and thin films of piezoelectric polymers into sophisticated 3D piezoelectric microsystems. To illustrate the engineering versatility of the approach, we create more than twenty different 3D geometries. With these structures, we then demonstrate applications in energy harvesting with tailored mechanical properties and root-mean-square voltages ranging from 2 mV to 790 mV, in multifunctional sensors for robotic prosthetic interfaces with improved responsivity (for example, anisotropic responses and sensitivity of 60 mV N −1 for normal force), and in bio-integrated devices with in vivo operational capabilities. The 3D geometries, especially those with ultralow stiffnesses or asymmetric layouts, yield unique mechanical attributes and levels of functionality that would be difficult or impossible to achieve with conventional two-dimensional designs.

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