Towards Modular Integrated Sensors: The Development of Artificial Haircell Sensors Using Efficient Fabrication Methods

Jack Chen; Zhifang Fan; Jonathan Engel; Chang Liu

Towards Modular Integrated Sensors: The Development of Artificial Haircell Sensors Using Efficient Fabrication Methods

Jack Chen^*, Zhifang Fan, Jonathan Engel, Chang Liu

^*Corresponding author for this work

Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Scopus citations

Abstract

We report the development of an artificial haircell (AHC) fabricated using two methods: (1) silicon bulk micromachining and (2) polymer surface micromachining. Both methods leverage efficient three dimensional assembly of microstructures. The AHC is modeled after biological hair cells, a common and versatile mechanoreceptor in biology. The design, fabrication process, along with testing results are discussed in the paper.

Original language	English (US)
Title of host publication	IEEE International Conference on Intelligent Robots and Systems
Pages	2341-2346
Number of pages	6
Volume	3
State	Published - Dec 26 2003
Event	2003 IEEE/RSJ International Conference on Intelligent Robots and Systems - Las Vegas, NV, United States Duration: Oct 27 2003 → Oct 31 2003

Other

Other	2003 IEEE/RSJ International Conference on Intelligent Robots and Systems
Country/Territory	United States
City	Las Vegas, NV
Period	10/27/03 → 10/31/03

ASJC Scopus subject areas

Control and Systems Engineering

Cite this

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title = "Towards Modular Integrated Sensors: The Development of Artificial Haircell Sensors Using Efficient Fabrication Methods",

abstract = "We report the development of an artificial haircell (AHC) fabricated using two methods: (1) silicon bulk micromachining and (2) polymer surface micromachining. Both methods leverage efficient three dimensional assembly of microstructures. The AHC is modeled after biological hair cells, a common and versatile mechanoreceptor in biology. The design, fabrication process, along with testing results are discussed in the paper.",

author = "Jack Chen and Zhifang Fan and Jonathan Engel and Chang Liu",

year = "2003",

month = dec,

day = "26",

language = "English (US)",

volume = "3",

pages = "2341--2346",

booktitle = "IEEE International Conference on Intelligent Robots and Systems",

note = "2003 IEEE/RSJ International Conference on Intelligent Robots and Systems ; Conference date: 27-10-2003 Through 31-10-2003",

}

TY - GEN

T1 - Towards Modular Integrated Sensors

T2 - 2003 IEEE/RSJ International Conference on Intelligent Robots and Systems

AU - Chen, Jack

AU - Fan, Zhifang

AU - Engel, Jonathan

AU - Liu, Chang

PY - 2003/12/26

Y1 - 2003/12/26

N2 - We report the development of an artificial haircell (AHC) fabricated using two methods: (1) silicon bulk micromachining and (2) polymer surface micromachining. Both methods leverage efficient three dimensional assembly of microstructures. The AHC is modeled after biological hair cells, a common and versatile mechanoreceptor in biology. The design, fabrication process, along with testing results are discussed in the paper.

AB - We report the development of an artificial haircell (AHC) fabricated using two methods: (1) silicon bulk micromachining and (2) polymer surface micromachining. Both methods leverage efficient three dimensional assembly of microstructures. The AHC is modeled after biological hair cells, a common and versatile mechanoreceptor in biology. The design, fabrication process, along with testing results are discussed in the paper.

UR - http://www.scopus.com/inward/record.url?scp=0347409415&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0347409415&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0347409415

VL - 3

SP - 2341

EP - 2346

BT - IEEE International Conference on Intelligent Robots and Systems

Y2 - 27 October 2003 through 31 October 2003

ER -

Towards Modular Integrated Sensors: The Development of Artificial Haircell Sensors Using Efficient Fabrication Methods

Abstract

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ASJC Scopus subject areas

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