Towards Modular Integrated Sensors: The Development of Artificial Haircell Sensors Using Efficient Fabrication Methods

Jack Chen*, Zhifang Fan, Jonathan Engel, Chang Liu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

We report the development of an artificial haircell (AHC) fabricated using two methods: (1) silicon bulk micromachining and (2) polymer surface micromachining. Both methods leverage efficient three dimensional assembly of microstructures. The AHC is modeled after biological hair cells, a common and versatile mechanoreceptor in biology. The design, fabrication process, along with testing results are discussed in the paper.

Original languageEnglish (US)
Title of host publicationIEEE International Conference on Intelligent Robots and Systems
Pages2341-2346
Number of pages6
Volume3
StatePublished - Dec 26 2003
Event2003 IEEE/RSJ International Conference on Intelligent Robots and Systems - Las Vegas, NV, United States
Duration: Oct 27 2003Oct 31 2003

Other

Other2003 IEEE/RSJ International Conference on Intelligent Robots and Systems
CountryUnited States
CityLas Vegas, NV
Period10/27/0310/31/03

ASJC Scopus subject areas

  • Control and Systems Engineering

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