Abstract
Transfer printing methods are used to pattern and assemble monolithic carbon nanotube (CNT) thin-film transistors on large-area transparent, flexible substrates. Airbrushed CNT thin-films with sheet resistance 1 kΩ sq -1 at 80% transparency were used as electrodes, and high quality chemical vapor deposition (CVD)-grown CNT networks were used as the semiconductor component. Transfer printing was used to pre-pattern and assemble thin film transistors on polyethylene terephthalate (PET) substrates which incorporated Al2O3/poly-methylmethacrylate (PMMA) dielectric bi-layer. CNT-based ambipolar devices exhibit field-effect mobility in range 1-33 cm2/V s and on/off ratio ∼103, comparable to the control devices fabricated using Au as the electrode material.
Original language | English (US) |
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Pages (from-to) | 3150-3154 |
Number of pages | 5 |
Journal | Microelectronic Engineering |
Volume | 88 |
Issue number | 10 |
DOIs | |
State | Published - Oct 2011 |
Externally published | Yes |
Keywords
- Carbon nanotubes
- Flexible transparent electronics
- Thin film transistors
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering