Transferred, Ultrathin Oxide Bilayers as Biofluid Barriers for Flexible Electronic Implants

Enming Song, Yoon Kyeung Lee, Rui Li, Jinghua Li, Xin Jin, Ki Jun Yu, Zhaoqian Xie, Hui Fang, Yiding Zhong, Haina Du, Jize Zhang, Guanhua Fang, Yerim Kim, Younghee Yoon, Muhammad A. Alam, Yongfeng Mei, Yonggang Huang, John A Rogers*

*Corresponding author for this work

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

The work presented here introduces a materials strategy that involves physically transferred, ultrathin layers of silicon dioxide (SiO 2 ) thermally grown on silicon wafers and then coated with hafnium oxide (HfO 2 ) by atomic layer deposition, as barriers that satisfy requirements for even the most challenging flexible electronic devices. Materials and physics aspects of hydrolysis and ionic transport associated with such bilayers define their performance and reliability characteristics. Systematic experimental studies and reactive diffusion modeling suggest that the HfO 2 film, even with some density of pinholes, slows dissolution of the underlying SiO 2 by orders of magnitude, independent of the concentration of ions in the surrounding biofluids. Accelerated tests that involve immersion in phosphate-buffered saline solution at a pH of 7.4 and under a constant electrical bias demonstrate that this bilayer barrier can also obstruct the transport of ions that would otherwise cause drifts in the operation of the electronics. Theoretical drift–diffusion modeling defines the coupling of dissolution and ion diffusion, including their effects on device lifetime. Demonstrations of such barriers with passive and active components in thin, flexible electronic test structures highlight the potential advantages for wide applications in chronic biointegrated devices.

Original languageEnglish (US)
Article number1702284
JournalAdvanced Functional Materials
Volume28
Issue number12
DOIs
StatePublished - Mar 21 2018

Fingerprint

Flexible electronics
Oxides
Ions
oxides
dissolving
Dissolution
electronics
Hafnium oxides
hafnium oxides
ions
Atomic layer deposition
pinholes
atomic layer epitaxy
Silicon wafers
Sodium Chloride
Silicon Dioxide
submerging
hydrolysis
Hydrolysis
phosphates

Keywords

  • biofluids
  • hafnium oxide
  • hermetic packaging
  • silicon dioxide
  • water-and-ion barriers

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics

Cite this

Song, Enming ; Lee, Yoon Kyeung ; Li, Rui ; Li, Jinghua ; Jin, Xin ; Yu, Ki Jun ; Xie, Zhaoqian ; Fang, Hui ; Zhong, Yiding ; Du, Haina ; Zhang, Jize ; Fang, Guanhua ; Kim, Yerim ; Yoon, Younghee ; Alam, Muhammad A. ; Mei, Yongfeng ; Huang, Yonggang ; Rogers, John A. / Transferred, Ultrathin Oxide Bilayers as Biofluid Barriers for Flexible Electronic Implants. In: Advanced Functional Materials. 2018 ; Vol. 28, No. 12.
@article{8e3a19338a744bda8e0331ccc0b473f7,
title = "Transferred, Ultrathin Oxide Bilayers as Biofluid Barriers for Flexible Electronic Implants",
abstract = "The work presented here introduces a materials strategy that involves physically transferred, ultrathin layers of silicon dioxide (SiO 2 ) thermally grown on silicon wafers and then coated with hafnium oxide (HfO 2 ) by atomic layer deposition, as barriers that satisfy requirements for even the most challenging flexible electronic devices. Materials and physics aspects of hydrolysis and ionic transport associated with such bilayers define their performance and reliability characteristics. Systematic experimental studies and reactive diffusion modeling suggest that the HfO 2 film, even with some density of pinholes, slows dissolution of the underlying SiO 2 by orders of magnitude, independent of the concentration of ions in the surrounding biofluids. Accelerated tests that involve immersion in phosphate-buffered saline solution at a pH of 7.4 and under a constant electrical bias demonstrate that this bilayer barrier can also obstruct the transport of ions that would otherwise cause drifts in the operation of the electronics. Theoretical drift–diffusion modeling defines the coupling of dissolution and ion diffusion, including their effects on device lifetime. Demonstrations of such barriers with passive and active components in thin, flexible electronic test structures highlight the potential advantages for wide applications in chronic biointegrated devices.",
keywords = "biofluids, hafnium oxide, hermetic packaging, silicon dioxide, water-and-ion barriers",
author = "Enming Song and Lee, {Yoon Kyeung} and Rui Li and Jinghua Li and Xin Jin and Yu, {Ki Jun} and Zhaoqian Xie and Hui Fang and Yiding Zhong and Haina Du and Jize Zhang and Guanhua Fang and Yerim Kim and Younghee Yoon and Alam, {Muhammad A.} and Yongfeng Mei and Yonggang Huang and Rogers, {John A}",
year = "2018",
month = "3",
day = "21",
doi = "10.1002/adfm.201702284",
language = "English (US)",
volume = "28",
journal = "Advanced Functional Materials",
issn = "1616-301X",
publisher = "Wiley-VCH Verlag",
number = "12",

}

Song, E, Lee, YK, Li, R, Li, J, Jin, X, Yu, KJ, Xie, Z, Fang, H, Zhong, Y, Du, H, Zhang, J, Fang, G, Kim, Y, Yoon, Y, Alam, MA, Mei, Y, Huang, Y & Rogers, JA 2018, 'Transferred, Ultrathin Oxide Bilayers as Biofluid Barriers for Flexible Electronic Implants', Advanced Functional Materials, vol. 28, no. 12, 1702284. https://doi.org/10.1002/adfm.201702284

Transferred, Ultrathin Oxide Bilayers as Biofluid Barriers for Flexible Electronic Implants. / Song, Enming; Lee, Yoon Kyeung; Li, Rui; Li, Jinghua; Jin, Xin; Yu, Ki Jun; Xie, Zhaoqian; Fang, Hui; Zhong, Yiding; Du, Haina; Zhang, Jize; Fang, Guanhua; Kim, Yerim; Yoon, Younghee; Alam, Muhammad A.; Mei, Yongfeng; Huang, Yonggang; Rogers, John A.

In: Advanced Functional Materials, Vol. 28, No. 12, 1702284, 21.03.2018.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Transferred, Ultrathin Oxide Bilayers as Biofluid Barriers for Flexible Electronic Implants

AU - Song, Enming

AU - Lee, Yoon Kyeung

AU - Li, Rui

AU - Li, Jinghua

AU - Jin, Xin

AU - Yu, Ki Jun

AU - Xie, Zhaoqian

AU - Fang, Hui

AU - Zhong, Yiding

AU - Du, Haina

AU - Zhang, Jize

AU - Fang, Guanhua

AU - Kim, Yerim

AU - Yoon, Younghee

AU - Alam, Muhammad A.

AU - Mei, Yongfeng

AU - Huang, Yonggang

AU - Rogers, John A

PY - 2018/3/21

Y1 - 2018/3/21

N2 - The work presented here introduces a materials strategy that involves physically transferred, ultrathin layers of silicon dioxide (SiO 2 ) thermally grown on silicon wafers and then coated with hafnium oxide (HfO 2 ) by atomic layer deposition, as barriers that satisfy requirements for even the most challenging flexible electronic devices. Materials and physics aspects of hydrolysis and ionic transport associated with such bilayers define their performance and reliability characteristics. Systematic experimental studies and reactive diffusion modeling suggest that the HfO 2 film, even with some density of pinholes, slows dissolution of the underlying SiO 2 by orders of magnitude, independent of the concentration of ions in the surrounding biofluids. Accelerated tests that involve immersion in phosphate-buffered saline solution at a pH of 7.4 and under a constant electrical bias demonstrate that this bilayer barrier can also obstruct the transport of ions that would otherwise cause drifts in the operation of the electronics. Theoretical drift–diffusion modeling defines the coupling of dissolution and ion diffusion, including their effects on device lifetime. Demonstrations of such barriers with passive and active components in thin, flexible electronic test structures highlight the potential advantages for wide applications in chronic biointegrated devices.

AB - The work presented here introduces a materials strategy that involves physically transferred, ultrathin layers of silicon dioxide (SiO 2 ) thermally grown on silicon wafers and then coated with hafnium oxide (HfO 2 ) by atomic layer deposition, as barriers that satisfy requirements for even the most challenging flexible electronic devices. Materials and physics aspects of hydrolysis and ionic transport associated with such bilayers define their performance and reliability characteristics. Systematic experimental studies and reactive diffusion modeling suggest that the HfO 2 film, even with some density of pinholes, slows dissolution of the underlying SiO 2 by orders of magnitude, independent of the concentration of ions in the surrounding biofluids. Accelerated tests that involve immersion in phosphate-buffered saline solution at a pH of 7.4 and under a constant electrical bias demonstrate that this bilayer barrier can also obstruct the transport of ions that would otherwise cause drifts in the operation of the electronics. Theoretical drift–diffusion modeling defines the coupling of dissolution and ion diffusion, including their effects on device lifetime. Demonstrations of such barriers with passive and active components in thin, flexible electronic test structures highlight the potential advantages for wide applications in chronic biointegrated devices.

KW - biofluids

KW - hafnium oxide

KW - hermetic packaging

KW - silicon dioxide

KW - water-and-ion barriers

UR - http://www.scopus.com/inward/record.url?scp=85025146756&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85025146756&partnerID=8YFLogxK

U2 - 10.1002/adfm.201702284

DO - 10.1002/adfm.201702284

M3 - Article

VL - 28

JO - Advanced Functional Materials

JF - Advanced Functional Materials

SN - 1616-301X

IS - 12

M1 - 1702284

ER -