The transparent conducting CdO thin film growth was studied using a highly volatile, thermally and air-stable cadmium precursor. The example of Cd-containing film growth was presented using metal-organic chemical vapour deposition (MOCVD) using a coordination complex as the precursor. The charge transport properties were compared and favourable results were obtained with the highest conductivities for CdO thin films grown by magnetron sputtering.
|Original language||English (US)|
|Number of pages||4|
|State||Published - Nov 2 2001|
ASJC Scopus subject areas
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering