Abstract
The transparent conducting CdO thin film growth was studied using a highly volatile, thermally and air-stable cadmium precursor. The example of Cd-containing film growth was presented using metal-organic chemical vapour deposition (MOCVD) using a coordination complex as the precursor. The charge transport properties were compared and favourable results were obtained with the highest conductivities for CdO thin films grown by magnetron sputtering.
Original language | English (US) |
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Pages (from-to) | 239-242 |
Number of pages | 4 |
Journal | Advanced Materials |
Volume | 13 |
Issue number | 21 |
State | Published - Nov 2 2001 |
ASJC Scopus subject areas
- General Materials Science
- Mechanics of Materials
- Mechanical Engineering