Transparent conducting Zn 1-xMg xO:(Al,In) thin films

D. J. Cohen*, K. C. Ruthe, S. A. Barnett

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

140 Scopus citations

Abstract

The growth of high quality Zn 1-xMg xO thin films was analyzed using magnetron sputtering. The double doping of Zn 1-xMg xO films with aluminum and indium was shown. The electrical and optical transmission properties were achieved in a 25 % oxygen atmosphere. The results show that the wide band gap and moderate electrical conductivity made ZnMgO films to be used in photovoltaic cells.

Original languageEnglish (US)
Pages (from-to)459-467
Number of pages9
JournalJournal of Applied Physics
Volume96
Issue number1
DOIs
StatePublished - Jul 1 2004

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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