Abstract
Zn0.3In1.4Sn0.3O3-δ (ZITO) thin films were grown by computer-controlled pulsed laser deposition (PLD) on (0 0 0 1) Al2O3 substrate. Cross-section and plan-view transmission electron microscopy (TEM) revealed that the ZITO films were composed of twin-related domains with their (2 2 2) planes parallel to (0 0 0 1) planes of the Al2O3 substrate. ZITO {5 over(5, -) 0} planes fitted well to Al2O3{3 over(3, -) 0 0} planes with a lattice mismatch of approximately 2.8%. Remarkable enhancement of electrical conductivity, about one order of magnitude higher than that of bulk ZITO, was found. The formation of twin-related domains and its effects on electrical and optical properties of ZITO films were also discussed.
Original language | English (US) |
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Pages (from-to) | 376-381 |
Number of pages | 6 |
Journal | Journal of Crystal Growth |
Volume | 308 |
Issue number | 2 |
DOIs | |
State | Published - Oct 15 2007 |
Funding
This project was supported by NREL and NSF (DMR-0071737) at the Materials Research Center of Northwestern University. The authors greatly appreciate Dr. Shuyou Li's help. TEM was performed in the EPIC facility of NUANCE Center at Northwestern University. NUANCE Center is supported by NSF-NSEC, NSF-MRSEC, Keck Foundation, the State of Illinois, and Northwestern University.
Keywords
- A1. Defects and interfaces
- A1. Orientation relationship
- A1. Transmission electron microscopy
- B1. Transparent conducting oxide thin films
ASJC Scopus subject areas
- Condensed Matter Physics
- Inorganic Chemistry
- Materials Chemistry