Two-Axis MEMS scanner with transfer-printed high-reflectivity, broadband monolithic silicon photonic crystal mirrors

Jae Woong Jeong, Bryan Park, Hohyun Keum, Seok Kim, John A. Rogers, Olav Solgaard

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

We present a two-Axis electrostatic MEMS scanner with highreflectivity monolithic single-crystal-silicon photonic crystal (PC) mirrors suitable for applications in harsh environments. The reflective surfaces of the MEMS scanner are transfer-printed PC mirrors with low polarization dependence, low angular dependence, and reflectivity over 85% in the wavelength range of 1490nm-1505nm and above 90% over the wavelength band of 1550-1570nm. In static mode, the scanner has total scan range of 10.2° on one rotation axis and 7.8° on the other. Dynamic operation on resonance increase the scan range to 21° at 608Hz around the outer rotation axis and 9.5° at 1.73kHz about the inner rotation axis.

Original languageEnglish (US)
Pages (from-to)13800-13809
Number of pages10
JournalOptics Express
Volume21
Issue number11
DOIs
StatePublished - Jun 3 2013

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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