Keyphrases
Two-axis
100%
Rotary Axis
100%
High Reflectivity
100%
Silicon Photonic Crystal
100%
MEMS Scanner
100%
Scanning Range
66%
Wavelength Band
33%
Polarization-independent
33%
Photonic Crystal
33%
Wavelength Range
33%
Reflective Surface
33%
Multicrystalline Silicon
33%
Reflectivity
33%
Dynamic Operation
33%
Angular Dependence
33%
Harsh Environment
33%
Low Polarization
33%
Static Mode
33%
Electrostatic MEMS
33%
Engineering
Rotation Axis
100%
Microelectromechanical System
100%
Silicon Photonics
100%
Reflectance
100%
Photonics
33%
Angular Dependence
33%
Electrostatic Force
33%
Physics
Silicon Photonics
100%
Microelectromechanical System
100%
Photonic Crystal
100%
Reflectance
100%
Electrostatics
33%
Single Crystal
33%
Material Science
Reflectivity
100%
Microelectromechanical System
100%
Silicon
100%
Photonic Crystal
100%
Single Crystal
33%
Computer Science
Silicon Photonics
100%
Wavelength Band
50%
Harsh Environment
50%
Wavelength Range
50%