Abstract
Extremely short InP-InGaAsP MMI 3-dB couplers (L ∼ 15-50 μm) with conventional structure have been successfully fabricated. The significant size reduction was achieved by deep dry etching and tapered access waveguide with large S-bend design. Optical transmission measurements on these devices have been performed. An optical bandwidth about 80 nm with a limit of 2-dB excess loss was obtained for most of the couplers. During the whole tunable wavelength range (λ ∼ 1485-1580 nm), the imbalance is within ±0.5 dB. Fabrication tolerance and polarization independence are also investigated and the results demonstrated the applicability of these ultracompact devices in high-density photonic integrated circuit.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 492-494 |
| Number of pages | 3 |
| Journal | IEEE Photonics Technology Letters |
| Volume | 12 |
| Issue number | 5 |
| DOIs | |
| State | Published - May 2000 |
Funding
Manuscript received November 22, 1999; revised January 31, 2000. This work was supported by DARPA/AFOSR Program under Award F49620–96–0262/P005 and made use of MRSEC Control Facilities of Northwestern University supported by the NSF under Award DMR-9632472.
Keywords
- 3-dB coupler
- Deep dry etching
- Excess loss
- Imbalance
- InP-InGaAsP
- Multimode interference
- Splitting ratio
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering