Ultrathin CNX overcoats for 1 Tb/in 2 hard disk drive systems

De Jun Li; Murat U. Guruz; Yip Wah Chung

Ultrathin CN_X overcoats for 1 Tb/in ² hard disk drive systems

De Jun Li, Murat U. Guruz, Yip Wah Chung

Materials Science and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Carbon nitride films were grown on silicon and hard disk substrates using pulsed dc magnetron sputtering in a single cathode deposition system. Substrates were mounted on a specially designed rotating holder that allowed 45° tilt angle and substrate rotation about the surface normal up to 20 rpm. AFM scans over 10x10 μm² showed that 50 nm thick CN_X films prepared under optimum substrate bias conditions have r.m.s. surface roughness almost four times lower than those prepared without substrate tilt and rotation. We observed a two-fold reduction in corrosion damage for hard disk substrates with 1 nm CN_X overcoats deposited with substrate tilt and rotation. This improved performance is likely a result of more efficient and uniform momentum transfer parallel to the surface during deposition in this configuration.

Original language	English (US)
Title of host publication	STLE/ASME 2001 International Joint Tribology Conference, TRIB 2001
Publisher	American Society of Mechanical Engineers (ASME)
Pages	61-64
Number of pages	4
ISBN (Electronic)	0791816877, 9780791816875
State	Published - Jan 1 2001
Event	STLE/ASME 2001 International Joint Tribology Conference, TRIB 2001 - San Francisco, United States Duration: Oct 21 2001 → Oct 24 2001

Publication series

Name	STLE/ASME 2001 International Joint Tribology Conference, TRIB 2001

Conference

Conference	STLE/ASME 2001 International Joint Tribology Conference, TRIB 2001
Country/Territory	United States
City	San Francisco
Period	10/21/01 → 10/24/01

ASJC Scopus subject areas

Mechanical Engineering
Surfaces and Interfaces
Surfaces, Coatings and Films
Condensed Matter Physics

Cite this

@inproceedings{038c9923ed2a465fbcb8196d6d7f2ee2,

title = "Ultrathin CNX overcoats for 1 Tb/in 2 hard disk drive systems",

abstract = "Carbon nitride films were grown on silicon and hard disk substrates using pulsed dc magnetron sputtering in a single cathode deposition system. Substrates were mounted on a specially designed rotating holder that allowed 45° tilt angle and substrate rotation about the surface normal up to 20 rpm. AFM scans over 10x10 μm2 showed that 50 nm thick CNX films prepared under optimum substrate bias conditions have r.m.s. surface roughness almost four times lower than those prepared without substrate tilt and rotation. We observed a two-fold reduction in corrosion damage for hard disk substrates with 1 nm CNX overcoats deposited with substrate tilt and rotation. This improved performance is likely a result of more efficient and uniform momentum transfer parallel to the surface during deposition in this configuration.",

author = "Li, {De Jun} and Guruz, {Murat U.} and Chung, {Yip Wah}",

note = "Funding Information: We thank the National Storage Industry Consortium for support of this work under the EHDR program. D.J.Li thanks the National Natural Science Foundation of China (Grant No. 10075034) for support during his stay at Northwestern University. Publisher Copyright: Copyright {\textcopyright} 2001 by ASME; STLE/ASME 2001 International Joint Tribology Conference, TRIB 2001 ; Conference date: 21-10-2001 Through 24-10-2001",

year = "2001",

month = jan,

day = "1",

language = "English (US)",

series = "STLE/ASME 2001 International Joint Tribology Conference, TRIB 2001",

publisher = "American Society of Mechanical Engineers (ASME)",

pages = "61--64",

booktitle = "STLE/ASME 2001 International Joint Tribology Conference, TRIB 2001",

}

Li, DJ, Guruz, MU & Chung, YW 2001, Ultrathin CN_X overcoats for 1 Tb/in ² hard disk drive systems. in STLE/ASME 2001 International Joint Tribology Conference, TRIB 2001. STLE/ASME 2001 International Joint Tribology Conference, TRIB 2001, American Society of Mechanical Engineers (ASME), pp. 61-64, STLE/ASME 2001 International Joint Tribology Conference, TRIB 2001, San Francisco, United States, 10/21/01.

Ultrathin CN_X overcoats for 1 Tb/in ² hard disk drive systems. / Li, De Jun; Guruz, Murat U.; Chung, Yip Wah.
STLE/ASME 2001 International Joint Tribology Conference, TRIB 2001. American Society of Mechanical Engineers (ASME), 2001. p. 61-64 (STLE/ASME 2001 International Joint Tribology Conference, TRIB 2001).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Guruz, Murat U.

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N1 - Funding Information: We thank the National Storage Industry Consortium for support of this work under the EHDR program. D.J.Li thanks the National Natural Science Foundation of China (Grant No. 10075034) for support during his stay at Northwestern University. Publisher Copyright: Copyright © 2001 by ASME

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N2 - Carbon nitride films were grown on silicon and hard disk substrates using pulsed dc magnetron sputtering in a single cathode deposition system. Substrates were mounted on a specially designed rotating holder that allowed 45° tilt angle and substrate rotation about the surface normal up to 20 rpm. AFM scans over 10x10 μm2 showed that 50 nm thick CNX films prepared under optimum substrate bias conditions have r.m.s. surface roughness almost four times lower than those prepared without substrate tilt and rotation. We observed a two-fold reduction in corrosion damage for hard disk substrates with 1 nm CNX overcoats deposited with substrate tilt and rotation. This improved performance is likely a result of more efficient and uniform momentum transfer parallel to the surface during deposition in this configuration.

AB - Carbon nitride films were grown on silicon and hard disk substrates using pulsed dc magnetron sputtering in a single cathode deposition system. Substrates were mounted on a specially designed rotating holder that allowed 45° tilt angle and substrate rotation about the surface normal up to 20 rpm. AFM scans over 10x10 μm2 showed that 50 nm thick CNX films prepared under optimum substrate bias conditions have r.m.s. surface roughness almost four times lower than those prepared without substrate tilt and rotation. We observed a two-fold reduction in corrosion damage for hard disk substrates with 1 nm CNX overcoats deposited with substrate tilt and rotation. This improved performance is likely a result of more efficient and uniform momentum transfer parallel to the surface during deposition in this configuration.

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