Ultrathin CNX overcoats for 1 Tb/in 2 hard disk drive systems

De Jun Li, Murat U. Guruz, Yip Wah Chung

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Carbon nitride films were grown on silicon and hard disk substrates using pulsed dc magnetron sputtering in a single cathode deposition system. Substrates were mounted on a specially designed rotating holder that allowed 45° tilt angle and substrate rotation about the surface normal up to 20 rpm. AFM scans over 10x10 μm2 showed that 50 nm thick CNX films prepared under optimum substrate bias conditions have r.m.s. surface roughness almost four times lower than those prepared without substrate tilt and rotation. We observed a two-fold reduction in corrosion damage for hard disk substrates with 1 nm CNX overcoats deposited with substrate tilt and rotation. This improved performance is likely a result of more efficient and uniform momentum transfer parallel to the surface during deposition in this configuration.

Original languageEnglish (US)
Title of host publicationSTLE/ASME 2001 International Joint Tribology Conference, TRIB 2001
PublisherAmerican Society of Mechanical Engineers (ASME)
Number of pages4
ISBN (Electronic)0791816877, 9780791816875
StatePublished - Jan 1 2001
EventSTLE/ASME 2001 International Joint Tribology Conference, TRIB 2001 - San Francisco, United States
Duration: Oct 21 2001Oct 24 2001

Publication series

NameSTLE/ASME 2001 International Joint Tribology Conference, TRIB 2001


ConferenceSTLE/ASME 2001 International Joint Tribology Conference, TRIB 2001
CountryUnited States
CitySan Francisco

ASJC Scopus subject areas

  • Mechanical Engineering
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Condensed Matter Physics

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