Ultrathin, Transferred Layers of Silicon Oxynitrides as Tunable Biofluid Barriers for Bioresorbable Electronic Systems

Ziying Hu; Jie Zhao; Hexia Guo; Rui Li; Mingzheng Wu; Jiahong Shen; Yue Wang; Zheng Qiao; Yue Xu; Greg Haugstad; Dongqi An; Zhaoqian Xie; Irawati Kandela; Khizar R. Nandoliya; Yu Chen; Yi Yu; Qunyao Yuan; Junyu Hou; Yujun Deng; Abdulaziz H. AlDubayan; Quansan Yang; Liangsong Zeng; Di Lu; Jahyun Koo; Wubin Bai; Enming Song; Shenglian Yao; Chris Wolverton; Yonggang Huang; John A. Rogers

doi:10.1002/adma.202307782

Ultrathin, Transferred Layers of Silicon Oxynitrides as Tunable Biofluid Barriers for Bioresorbable Electronic Systems

Ziying Hu, Jie Zhao^*, Hexia Guo, Rui Li, Mingzheng Wu, Jiahong Shen, Yue Wang, Zheng Qiao, Yue Xu, Greg Haugstad, Dongqi An, Zhaoqian Xie, Irawati Kandela, Khizar R. Nandoliya, Yu Chen, Yi Yu, Qunyao Yuan, Junyu Hou, Yujun Deng, Abdulaziz H. AlDubayanQuansan Yang, Liangsong Zeng, Di Lu, Jahyun Koo, Wubin Bai, Enming Song, Shenglian Yao, Chris Wolverton^*, Yonggang Huang^*, John A. Rogers^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

Bio/ecoresorbable electronic systems create unique opportunities in implantable medical devices that serve a need over a finite time period and then disappear naturally to eliminate the need for extraction surgeries. A critical challenge in the development of this type of technology is in materials that can serve as thin, stable barriers to surrounding ground water or biofluids, yet ultimately dissolve completely to benign end products. This paper describes a class of inorganic material (silicon oxynitride, SiON) that can be formed in thin films by plasma-enhanced chemical vapor deposition for this purpose. In vitro studies suggest that SiON and its dissolution products are biocompatible, indicating the potential for its use in implantable devices. A facile process to fabricate flexible, wafer-scale multilayer films bypasses limitations associated with the mechanical fragility of inorganic thin films. Systematic computational, analytical, and experimental studies highlight the essential materials aspects. Demonstrations in wireless light-emitting diodes both in vitro and in vivo illustrate the practical use of these materials strategies. The ability to select degradation rates and water permeability through fine tuning of chemical compositions and thicknesses provides the opportunity to obtain a range of functional lifetimes to meet different application requirements.

Original language	English (US)
Article number	2307782
Journal	Advanced Materials
Volume	36
Issue number	15
DOIs	https://doi.org/10.1002/adma.202307782
State	Published - Apr 11 2024

Funding

Z.H., J.Z., H.G., and R.L. contributed equally to this work. This work utilized Northwestern University Micro/Nano Fabrication Facility (NUFAB), Electron Probe Instrumentation Center (EPIC), Keck Interdisciplinary Surface Science facility (Keck\u2010II), Scanned Probe Imaging and Development (SPID) facility of Northwestern University's NUANCE Center, which received support from Soft and Hybrid Nanotechnology Experimental (SHyNE) Resource (NSF ECCS\u20102025633), the IIN, and Northwestern's MRSEC program (NSF DMR\u20101720139), and the Querrey\u2010Simpson Institute for Bioelectronics. The authors thank M.S. Nayereh Ghoreishi\u2010Haack and Dr. Elizabeth Dempsey for the help with the studies on CBC and blood chemistry and thank Dr. Rizaldy P. Scott and Sheila Mae B. Acar for tissue sectioning and staining. The authors thank Dr. Reiner Bleher for the discussion on the preparation of film implants for SEM characterization. The authors also thank M.Sc. Rebecca A. Sponenburg for the measurements of Si distribution in organs. J.Z. acknowledges the support from Science & Technology Commission of Shanghai Municipality (21ZR1409300 and 23160714000) and Open Research Fund of State Key Laboratory of Bioelectronics, Southeast University (SKLB2022\u2010K09). R.L. acknowledges the support from the National Natural Science Foundation of China (Grant Nos. 12022209 and 12372067). Z.X. acknowledges the support from the National Natural Science Foundation of China (Grant No. 12072057), LiaoNing Revitalization Talents Program (Grant No. XLYC2007196), Dalian Outstanding Young Talents in Science and Technology (2021RJ06), and International Cooperation Fund Project of DBJI (Grant No. ICR2110). Y.H. acknowledges support from NSF (CMMI1635443). Z.H., J.Z., H.G., and R.L. contributed equally to this work. This work utilized Northwestern University Micro/Nano Fabrication Facility (NUFAB), Electron Probe Instrumentation Center (EPIC), Keck Interdisciplinary Surface Science facility (Keck-II), Scanned Probe Imaging and Development (SPID) facility of Northwestern University's NUANCE Center, which received support from Soft and Hybrid Nanotechnology Experimental (SHyNE) Resource (NSF ECCS-2025633), the IIN, and Northwestern's MRSEC program (NSF DMR-1720139), and the Querrey-Simpson Institute for Bioelectronics. The authors thank M.S. Nayereh Ghoreishi-Haack and Dr. Elizabeth Dempsey for the help with the studies on CBC and blood chemistry and thank Dr. Rizaldy P. Scott and Sheila Mae B. Acar for tissue sectioning and staining. The authors thank Dr. Reiner Bleher for the discussion on the preparation of film implants for SEM characterization. The authors also thank M.Sc. Rebecca A. Sponenburg for the measurements of Si distribution in organs. J.Z. acknowledges the support from Science & Technology Commission of Shanghai Municipality (21ZR1409300 and 23160714000) and Open Research Fund of State Key Laboratory of Bioelectronics, Southeast University (SKLB2022-K09). R.L. acknowledges the support from the National Natural Science Foundation of China (Grant Nos. 12022209 and 12372067). Z.X. acknowledges the support from the National Natural Science Foundation of China (Grant No. 12072057), LiaoNing Revitalization Talents Program (Grant No. XLYC2007196), Dalian Outstanding Young Talents in Science and Technology (2021RJ06), and International Cooperation Fund Project of DBJI (Grant No. ICR2110). Y.H. acknowledges support from NSF (CMMI1635443).

Keywords

biofluid barriers
bioresorbable electronics
electronics packaging
silicon oxynitrides
transient electronics

ASJC Scopus subject areas

General Materials Science
Mechanics of Materials
Mechanical Engineering

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10.1002/adma.202307782

Cite this

Hu, Z., Zhao, J., Guo, H., Li, R., Wu, M., Shen, J., Wang, Y., Qiao, Z., Xu, Y., Haugstad, G., An, D., Xie, Z., Kandela, I., Nandoliya, K. R., Chen, Y., Yu, Y., Yuan, Q., Hou, J., Deng, Y., ... Rogers, J. A. (2024). Ultrathin, Transferred Layers of Silicon Oxynitrides as Tunable Biofluid Barriers for Bioresorbable Electronic Systems. Advanced Materials, 36(15), Article 2307782. https://doi.org/10.1002/adma.202307782

@article{fc9d8a08e7bc4578be4c8ff5e4b96e9f,

title = "Ultrathin, Transferred Layers of Silicon Oxynitrides as Tunable Biofluid Barriers for Bioresorbable Electronic Systems",

abstract = "Bio/ecoresorbable electronic systems create unique opportunities in implantable medical devices that serve a need over a finite time period and then disappear naturally to eliminate the need for extraction surgeries. A critical challenge in the development of this type of technology is in materials that can serve as thin, stable barriers to surrounding ground water or biofluids, yet ultimately dissolve completely to benign end products. This paper describes a class of inorganic material (silicon oxynitride, SiON) that can be formed in thin films by plasma-enhanced chemical vapor deposition for this purpose. In vitro studies suggest that SiON and its dissolution products are biocompatible, indicating the potential for its use in implantable devices. A facile process to fabricate flexible, wafer-scale multilayer films bypasses limitations associated with the mechanical fragility of inorganic thin films. Systematic computational, analytical, and experimental studies highlight the essential materials aspects. Demonstrations in wireless light-emitting diodes both in vitro and in vivo illustrate the practical use of these materials strategies. The ability to select degradation rates and water permeability through fine tuning of chemical compositions and thicknesses provides the opportunity to obtain a range of functional lifetimes to meet different application requirements.",

keywords = "biofluid barriers, bioresorbable electronics, electronics packaging, silicon oxynitrides, transient electronics",

author = "Ziying Hu and Jie Zhao and Hexia Guo and Rui Li and Mingzheng Wu and Jiahong Shen and Yue Wang and Zheng Qiao and Yue Xu and Greg Haugstad and Dongqi An and Zhaoqian Xie and Irawati Kandela and Nandoliya, {Khizar R.} and Yu Chen and Yi Yu and Qunyao Yuan and Junyu Hou and Yujun Deng and AlDubayan, {Abdulaziz H.} and Quansan Yang and Liangsong Zeng and Di Lu and Jahyun Koo and Wubin Bai and Enming Song and Shenglian Yao and Chris Wolverton and Yonggang Huang and Rogers, {John A.}",

note = "Publisher Copyright: {\textcopyright} 2024 The Authors. Advanced Materials published by Wiley-VCH GmbH.",

year = "2024",

month = apr,

day = "11",

doi = "10.1002/adma.202307782",

language = "English (US)",

volume = "36",

journal = "Advanced Materials",

issn = "0935-9648",

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Hu, Z, Zhao, J, Guo, H, Li, R, Wu, M, Shen, J, Wang, Y, Qiao, Z, Xu, Y, Haugstad, G, An, D, Xie, Z, Kandela, I, Nandoliya, KR, Chen, Y, Yu, Y, Yuan, Q, Hou, J, Deng, Y, AlDubayan, AH, Yang, Q, Zeng, L, Lu, D, Koo, J, Bai, W, Song, E, Yao, S, Wolverton, C , Huang, Y & Rogers, JA 2024, 'Ultrathin, Transferred Layers of Silicon Oxynitrides as Tunable Biofluid Barriers for Bioresorbable Electronic Systems', Advanced Materials, vol. 36, no. 15, 2307782. https://doi.org/10.1002/adma.202307782

TY - JOUR

T1 - Ultrathin, Transferred Layers of Silicon Oxynitrides as Tunable Biofluid Barriers for Bioresorbable Electronic Systems

AU - Hu, Ziying

AU - Zhao, Jie

AU - Guo, Hexia

AU - Li, Rui

AU - Wu, Mingzheng

AU - Shen, Jiahong

AU - Wang, Yue

AU - Qiao, Zheng

AU - Xu, Yue

AU - Haugstad, Greg

AU - An, Dongqi

AU - Xie, Zhaoqian

AU - Kandela, Irawati

AU - Nandoliya, Khizar R.

AU - Chen, Yu

AU - Yu, Yi

AU - Yuan, Qunyao

AU - Hou, Junyu

AU - Deng, Yujun

AU - AlDubayan, Abdulaziz H.

AU - Yang, Quansan

AU - Zeng, Liangsong

AU - Lu, Di

AU - Koo, Jahyun

AU - Bai, Wubin

AU - Song, Enming

AU - Yao, Shenglian

AU - Wolverton, Chris

AU - Huang, Yonggang

AU - Rogers, John A.

PY - 2024/4/11

Y1 - 2024/4/11

N2 - Bio/ecoresorbable electronic systems create unique opportunities in implantable medical devices that serve a need over a finite time period and then disappear naturally to eliminate the need for extraction surgeries. A critical challenge in the development of this type of technology is in materials that can serve as thin, stable barriers to surrounding ground water or biofluids, yet ultimately dissolve completely to benign end products. This paper describes a class of inorganic material (silicon oxynitride, SiON) that can be formed in thin films by plasma-enhanced chemical vapor deposition for this purpose. In vitro studies suggest that SiON and its dissolution products are biocompatible, indicating the potential for its use in implantable devices. A facile process to fabricate flexible, wafer-scale multilayer films bypasses limitations associated with the mechanical fragility of inorganic thin films. Systematic computational, analytical, and experimental studies highlight the essential materials aspects. Demonstrations in wireless light-emitting diodes both in vitro and in vivo illustrate the practical use of these materials strategies. The ability to select degradation rates and water permeability through fine tuning of chemical compositions and thicknesses provides the opportunity to obtain a range of functional lifetimes to meet different application requirements.

AB - Bio/ecoresorbable electronic systems create unique opportunities in implantable medical devices that serve a need over a finite time period and then disappear naturally to eliminate the need for extraction surgeries. A critical challenge in the development of this type of technology is in materials that can serve as thin, stable barriers to surrounding ground water or biofluids, yet ultimately dissolve completely to benign end products. This paper describes a class of inorganic material (silicon oxynitride, SiON) that can be formed in thin films by plasma-enhanced chemical vapor deposition for this purpose. In vitro studies suggest that SiON and its dissolution products are biocompatible, indicating the potential for its use in implantable devices. A facile process to fabricate flexible, wafer-scale multilayer films bypasses limitations associated with the mechanical fragility of inorganic thin films. Systematic computational, analytical, and experimental studies highlight the essential materials aspects. Demonstrations in wireless light-emitting diodes both in vitro and in vivo illustrate the practical use of these materials strategies. The ability to select degradation rates and water permeability through fine tuning of chemical compositions and thicknesses provides the opportunity to obtain a range of functional lifetimes to meet different application requirements.

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KW - bioresorbable electronics

KW - electronics packaging

KW - silicon oxynitrides

KW - transient electronics

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Ultrathin, Transferred Layers of Silicon Oxynitrides as Tunable Biofluid Barriers for Bioresorbable Electronic Systems

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