Utilization of Metal-Organic Frameworks for the Management of Gases Used in Ion Implantation

G. M. Tom, W. Morris, M. H. Weston, P. E. Fuller, P. W. Siu, C. R. Murdock, J. P. Siegfried, O. K. Farha

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Metal-Organic Frameworks (MOFs) are porous extended crystalline structures comprised of organic ligands and metal units. By changing the identity of the organic ligand and metal unit utilized in the MOF synthesis, the structure, surface area, pore size, and reactivity of the MOF can be modulated. This structural flexibility means that MOFs can potentially be used in a wide range of storage, separation, and catalytic applications. There is a high level of interest in the storage, delivery, capture, and purification of ultra high-purity hazardous gases used in electronics manufacturing (electronic gases). This paper will discuss the use of MOFs as an ideal platform for product and process innovation in the electronic gas sector.

Original languageEnglish (US)
Title of host publication2016 21st International Conference on Ion Implantation Technology, IIT 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781509020232
DOIs
StatePublished - Mar 20 2017
Event21st International Conference on Ion Implantation Technology, IIT 2016 - Tainan, Taiwan, Province of China
Duration: Sep 26 2016Sep 30 2016

Publication series

NameProceedings of the International Conference on Ion Implantation Technology

Other

Other21st International Conference on Ion Implantation Technology, IIT 2016
CountryTaiwan, Province of China
CityTainan
Period9/26/169/30/16

Keywords

  • Hazardous Gas
  • Implant
  • MOF
  • NuMat
  • Semiconductor

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Fingerprint Dive into the research topics of 'Utilization of Metal-Organic Frameworks for the Management of Gases Used in Ion Implantation'. Together they form a unique fingerprint.

Cite this