Utilization of Metal-Organic Frameworks for the Management of Gases Used in Ion Implantation

G. M. Tom, W. Morris, M. H. Weston, P. E. Fuller, P. W. Siu, C. R. Murdock, J. P. Siegfried, O. K. Farha

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds