Abstract
A very high transconductance (260 mS/mm) has been achieved for the first time with an InGaAs/InP junction field-effect transistor. The transistor was fabricated using a chemical etching technique which allowed the fabrication of submicrometer gate (0.5 μm). Very low values of access resistance were obtained using a self-aligned technology.
Original language | English (US) |
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Pages (from-to) | 535-536 |
Number of pages | 2 |
Journal | Applied Physics Letters |
Volume | 50 |
Issue number | 9 |
DOIs | |
State | Published - 1987 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)