Volatile, fluorine-free β-ketoiminate precursors for MOCVD growth of lanthanide oxide thin films

N. L. Edleman, J. A. Belot, J. R. Babcock, A. W. Metz, M. V. Metz, C. L. Stern, T. J. Marks*

*Corresponding author for this work

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Chemical Engineering

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Material Science