Volatile Hexavalent Oxo-amidinate Complexes: Molybdenum and Tungsten Precursors for Atomic Layer Deposition

Aidan R. Mouat, Anil U. Mane, Jeffrey W. Elam, Massimiliano Delferro*, Tobin J. Marks, Peter C. Stair

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

37 Scopus citations

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