We report the realization and demonstration of novel semiconductor waveguide-coupled microcavity ring and disk resonators. For a 10.5-μm-diameter disk resonator, we measure a finesse of 120, a resonant linewidth of 0.18 nm, and a free-spectral range of 21.6 nm in the 1.55-μm-wavelength region. We present the nanofabrication methods and the experimental results for 10.5- and 20.5-μm-diameter ring and disk resonators to show the feasibility of such devices.
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics