Wet Chemical Patterning of KTP Thin Films for Nonlinear Optical Waveguide Applications

Shengli Wu, S. T. Ho

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

A new and simple method to etch and pattern potassium titanyl phosphate (KTP) thin films has been developed. We found that KTP films on fused quartz subtrates can be etched down using a wet chemical mixture of HC1:2H20 at 75°C. Using the etchant, rib waveguide structures have been fabricated with photolithography.

Original languageEnglish (US)
Pages (from-to)3556-3557
Number of pages2
JournalJournal of the Electrochemical Society
Volume142
Issue number10
DOIs
StatePublished - Oct 1995

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films
  • Electrochemistry
  • Materials Chemistry

Fingerprint

Dive into the research topics of 'Wet Chemical Patterning of KTP Thin Films for Nonlinear Optical Waveguide Applications'. Together they form a unique fingerprint.

Cite this