Abstract
X-ray diffraction topography was used to study laser drilling of (001) silicon. Double crystal, Lang projection and section topography were used to characterize the deformation surrounding holes drilled with a Nd/YAG laser operated at various energy densities. Scanning electron microscopy showed significantly different hole wall morphologies, and the relationship between these structures and the resulting strain field was investigated. This preliminary study indicated the feasibility of using section topography to quantify and map the different components of strain around laser-drilled holes in silicon.
Original language | English (US) |
---|---|
Pages (from-to) | 87-93 |
Number of pages | 7 |
Journal | Materials Letters |
Volume | 7 |
Issue number | 3 |
DOIs | |
State | Published - Sep 1988 |
Funding
We acknowledgues eof the facilitieso f the MRL Centerf or Microanalysiso f Materials,U niversityo f Illinois, which is supporteda s a nationalf acility by the MaterialsS ciencesD ivision of theU nited States Departmento f Energy under contract DE-AC02-76ERO198W. e alsoa cknowledgMe r. F.J. Scheltens for his help with the SEM.
ASJC Scopus subject areas
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering